Layer termination from ellipsometric information is absolutely built-in into Aeres®. A range of multi-wavelength and spectroscopic ellipsometry remedies can be found Using the ion beam sputter deposition process.

In-situ optical checking and Manage is on the market as a result of Angstrom’s optical monitoring & Handle bundle.

An optional cryogenic pump improves base strain and pumping velocity and can be isolated through the chamber through reactive processes with oxygen.

In-situ ellipsometry provides critical info on the overall performance of an optical film while it can be getting deposited.

Our Reticle® ion beam sputter deposition devices are developed and engineered to make specific optical films of the highest purity, density, and stability.

If it’s off by even 50 % a degree, it's going to have an impact on the morphology of such nanostructures noticeably.

Angstrom Engineering® designs and engineers Each and every Reticle® System to deliver our partners in the optics Neighborhood the chance to generate the movies they need with great purity, density, and uniformity, all in the really repeatable and automatic style.

Our exceptional design and style permits direct or indirect checking on the variable angle phase, getting rid of the need for tooling components or perhaps a witness glass changer. Find out more with regards to the Optical Monitoring & Command package below.

As well as sample rotation, the variable angle stage that may be utilized for Reticle® delivers for in-developed angular movement from the deposition flux.

All standard Reticle® platforms include things like an additional gridless conclusion-Corridor ion supply with hollow cathode neutralizer.

The deposition ion supply is directed towards a cloth focus on which has been optimized Molybdenum evaporation sources in each sizing and situation for your required deposition geometry.

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A reduced-frequency neutralizer assures stable beam operation with out contamination from a standard filament.

Dynamic uniformity shaping is achieved employing a flux correction shield concerning the deposition supply and also the substrate.

Considerate design and style on the ion beam concentrating optics confines the beam fully to the region in the goal, eradicating any risk of contamination.